地 址：东莞市塘厦镇振兴围安南路13号
电 话：0769-89871334
手 机：13729940589
联系人：刘经理
网 站：www.dgptp.cc
邮 箱：info@bwd-tech.com
Transfer masks onto substrates coated with photoresist
High resolution contact mask aligner
Sub-micron feature capability in positive tone resists
Top-side alignment capability
Bottom-side alignment (Second alignment microscope)
Mask holder allows round and square plates as masks
Sample plate: Small & odd-shape substrates
KARL SUSS / MICROTEC PO449/2012 Mask aligner (SMTL Upgraded) included
Automatic wedge compensation system:
1 to 1000 micron resolution 1 micron
Movement range mask aligner mode:
X ±10.0 mm, Y ±5.0 mm, Theta ±5°
Movement range bond aligner mode:
X ±3.0 mm, Y±3.0 mm, Theta ±3°
Machine base with mechanical pneumatic and electrical equipment:
230 V, 150/60 Hz
Adapter system for mask holders:
Mask holders for masks up to 7" x 7" maximum
TSA Microscope stage:
With motorized X-Y-manipulator
Manual rotation for microscope
Manual loading and unloading wafers / substrates
Microprocessor control with LCD display
Lithography applications:
Wafers 2" up to 150 mm diameter
Substrates 2" x 2" up to 6" x 6"
Wafers 3" up to 150 mm diameter for bond applications
Operator manual on CD
G204712:
MA / BA6-8I WD, 33/MAN Alignment stage
X-Y-Theta alignment stage with high precision micrometer screws
WEC Head for BSA microscope objective
Separation in X direction: 15 mm to 100 mm
Motorized z-axis
G170010:
MA6 / BA6 Vibration isolation and damping system
Anti-vibration machine base frame / Black
Dimension: 930 mm x 950 mm x 705 mm
Shelf 280 mm x 700 mm
(3) Covers right, left and backside
(4) Wheels
Handrest for ergonomic operation of the machine
Pneumatic vibration isolation and automatic height control
Vertical frequency of resonance: < 2 Hz at rated load
Horizontal frequency of resonance: < 1.8 Hz at rated load
Improved horizontal damping
Maximum load: 590 kg
Vertical adjustment stands
G1B2171: Enhanced images storage system (EISS) for MA8 / MA6
PC With image and fine focus control
M306/B, DVM6/B and BSA
TFT Flat screen, 17"
Integrated trackball
S-VGA Resolution: 1280 x 1024
Contrast integration function for pure
Electronic brightness
G190435: Bottom side alignment system MA6 / BA6 / BA8 AA=33 EISS
(2) Video microscopes
With selectable magnification: 128 x / 410 X (Refers to 17" monitor)
Motorized stages
Separation: X: 15 mm to 100 mm
Travel in Y: - 20 mm to + 50 mm
Motorized focus: 6 mm
(2) CCD Video cameras, 1/2"
