少子寿命测量仪MDPspot

Low cost table top lifetime measurement system for

characterisation of a variety of different silicon samples at

different preparation stages with manual handling. Optional

hand operated z-axis for thicker samples up to 156 mm

bricks. Standard software for result visualisation.

低成本台式寿命测量系统，用于在不同准备阶段用手动操作表征各种不同硅样品。手动操作的Z轴可以选择厚达156毫米的砖块。结果可视化的标准软件。

The MDPspot includes an additional resistivity

measurement option. Resistivity measurements for silicon

only, either for wafers without height adjustment possibility,

or for bricks. One of these two options has to be predefined.

MDPspot包含附加的电阻率测量选项。仅用于硅的电阻率测量，无论是用于无高度调整的晶圆，还是用于砖块。这两个选项中的一个必须预先定义。

 

Advantages

Table top unit for single point measurements of carrier lifetime, multi- or mono-crystalline silicon at different preparation stages, from as- grown up to final devices.

Small size, low cost and easy to use. Comes with a basic software for result visualisation on a small PC or notebook.

Suitable for wafers up to bricks, with easy to handle height adjustment

优点

• 台式单元，用于单点测量载流子寿命，不同制备阶段的多晶硅或单晶硅，从成长到最终器件。
• 体积小，成本低，易于使用。在小型PC或笔记本上附带一个基本软件，用于结果可视化。
• 适用于砖块，容易处理高度调整。

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